Cleanroom

Cleanroom ISO 6

Project Scope: Cleanroom design and construction, Architectural cleanroom ceiling, walls & raised access floor. Mechanical system (HVAC, make up air, process exhaust, CHW piping, process cooling water, fire protection, DDC controls), electrical system (power distribution to HVAC, process equipment, lighting & fire alarm system).

Cleanroom Service Chase

Cleanroom Service Chase

Instrumentation Test Room

Temperature control room (TCR room, with laminar flow with temperature variation of +/- 0.5oF in the room.

Mechanical Equipment Room

Air handler & make up air units with multistage filtration, CHW coil, reheat coil & VFD, supplying air to cleanroom ISO 6 & ISO 7

Mechanical Equipment Room

Air handler & make up air units with multistage filtration, CHW coil, reheat coil & VFD, supplying air to cleanroom ISO 6 & ISO 7

Process Gas Distribution

Process gas delivery & exhaust system, including gas delivery system to process tools & exhaust system, including monitoring system (Temperature, humidity, pressure, gas detection system & life safety monitoring).

Process Distribution

Process gas delivery & exhaust system, including gas delivery system to process tools & exhaust system, including monitoring system (Temperature, humidity, pressure, gas detection system & life safety monitoring).

Open lab/Office HVAC & Lighting distribution.

Open lab/Office HVAC & Lighting distribution. Cleanroom ISO 6/ISO 7 under mezzanine

Dedicated packaged makeup/air handler unit for open lab HVAC system, backup generator for cleanroom, temperature control room power & HVAC backup.

Cleanroom ISO 6

Project Scope: Cleanroom design and construction, architectural cleanroom ceiling, walls & raised access floor. Mechanical system (HVAC, make up air, process exhaust, CHW piping, process cooling water, fire protection, DDC controls), electrical system (power distribution to HVAC, process equipment, lighting & fire alarm system).

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 7

Cleanroom ISO 7

Process Cooling Water

Process cooling water (PCW skid, complete with storage tank, pumps, heat exchanger, supplying PCW to Cleanroom process tools).

Cleanroom ISO 6

Project Scope: Cleanroom design and construction, architectural cleanroom ceiling, walls & laboratory furniture. Mechanical System (HVAC, exhaust system, DDC controls, fire protection) electrical system (Power distribution to HVAC & lab equipment).

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 6

Cleanroom ISO 7

Cleanroom ISO 7

Cleanroom ISO 6

Scope of work: Cleanroom design and construction, HVAC, process exhaust, CDA, DI, WWT, fire protection, DDC controls, electrical distribution to HVAC and process equipment, raised access floor grounding, lighting.

Cleanroom Expansion

Scope of work: Cleanroom design and construction, HVAC, fire protection, CHW piping, electrical distribution.

Cleanroom ISO 6

Project scope: cleanroom design and construction, mechanical system (HVAC, CHW piping, fire protection), electrical system (power distribution to HVAC and process equipment, lighting and fire alarm system).

Cleanroom Expansion

Expansion for cleanroom facility including HVAC, process exhaust, CDA, N2, He, DDC controls, fire protection, electrical system.

Cleanroom Expansion

Scope of work: HVAC, process exhaust, CDA, N2, He, DDC controls, fire protection, electrical system.

Cleanroom ISO 4

Wafer manufacturing facility: cleanroom design & construction, HVAC, fire protection, CDA, N2, He, DI water, process exhaust system, fire protection, electrical distribution.

Cleanroom ISO 6 Wafer Test Facility

Scope of work: cleanroom design and construction, HVAC, process exhaust, CDA, DI, WWT, fire protection, DDC controls, electrical distribution to HVAC and process equipment, raised access floor grounding, lighting.

Cleanroom ISO 6

Scope of work: cleanroom design and construction, mechanical system (HVAC, CHW piping, Fire Protection), electrical system (power distribution to HVAC and process equipment, lighting and fire alarm system).

Cleanroom ISO 6

Cleanroom ISO 6 wafer test facility, with raised access floor in a R&D facility. The scope of work included the design and installation of mechanical system (HVAC, plumbing, fire protection, building automation, DDC controls), electrical distribution for HVAC and process equipment, and process utilities (CDA, process cooling water, DI water, scrubbed exhuast system).

Clean Dry Air System

Cleanroom process utility design & installation, central utility building, clean dry air (CDA) distribution system.

Cleanroom ISO 5

Class 100 cleanroom design and installation

Cleanroom ISO 5

Scope of work: process utilities, process gas system (inert gas delivery system), process vacuum, process exhaust design & installation.

Raised Access Floor

Raised access floor system for cleanroom ISO3 through ISO6.

Cleanroom Ceiling

Cleanroom ceiling grid system with HEPA filters, lighting for ISO6 through ISO8 cleanrooms.

Cleanroom ISO4

Design and installation of cleanroom ISO4, recirculating air handling unit with pressurized plenum.

Process Exhaust System

Acid scrubbed exhaust system, scrubber, exhaust fans, exhaust ductwork for semiconductor facility.

Process utility

Process utility design and installation for cleanroom ISO4: process cooling water system, process vacuum, gas cabinets, process exhaust, subfab cleanroom semiconductor facility.

DI Water System

18 meg ohm, high purity water system and piping distribution for cleanroom ISO4.

Ducted Filters with Recirc Unit
Fan Filter Units
Pressurized Plenum with Recirc Unit

Cleanroom ISO 5 Test Facility

Cleanroom design and construction, ceiling system, flooring, HVAC system, process exhaust, CDA, DI water, fire protection, ionization system, DDC controls, electrical distribution, grounding system and fire alarm system

Cleanroom ISO 5

Cleanroom design and installation, ceiling system, cleanroom wall system, raised access floor, mechanical (HVAC, makeup air, process exhaust, process utilities, CDA, process vacuum, DI water), DDC controls, fire protection, electrical distribution (lighting, fire alarm, process power, grounding).

Cleanroom ISO 4

Scope of work: cleanroom design and construction, HVAC, process exhaust, CDA, DI, WWT, fire protection, DDC controls, electrical distribution to HVAC and process equipment, raised access floor grounding, lighting.